Standard Wafer Specifications

Wafer	2″	3″	4″	5″	6″	8″	12″	16″
Standard Diameters (mm)	50.8	76.2	100	125	150	200	300	400
Diameter Tolerance (mm)	0.2	0.2	0.2	0.2	0.2	0.3	0.3	0.3
Standard Thickness (µm)	275	375	500	625	650	725	800	825
Standard Tolerance ±(µm)	25	25	25	25	25	50	50	50
Standard TTV (µm)	<20	<25	<25	<40	<40	<50	<50	<100
Surface Roughness (Å)	<20	<20	<20	<20	<20	<20	<20	<20
Surface Quality (MIL-0-13830)	60/40	60/40	60/40	60/40	60/40	80/50	80/50	80/50
Flatness (µm / 25.4mm)	< 2	< 3	< 4	< 4	< 4	< 5	< 5	< 5
Parallelism (µm / 25.4mm)	< 4	< 4	< 5	< 5	< 5	< 6	< 5	< 4
Machine Chamfered Edges	yes	yes	yes	yes	yes	yes	yes	yes
Maximum Edge Chip (mm)	0.25	0.25	0.25	0.25	0.25	0.25	0.25	0.25